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Pump technology helps preserve the global environment. Here are the possibilities:

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Vacuum pumps

Application
Semiconductor Manufacturing Process
Flat Panel Display Manufacturing Process
Photovoltaics Manufacturing Process
Picture / TDP
Series Catalog Pump Type Pumping Speed(l/min) Ultimate Pressure(Pa)
TDP PDF Screw-Type Dry Vacuum Pump 1000 to 9000 to 0.13
  • RemarksMicroprocessor type
TD PDF Screw-Type Dry Vacuum Pump 650 to 3000 to 0.7
  • RemarksProgramable Controller type
RMC PDF Mechanical Booster 3500 to 20000 to 0.1
BEH PDF Screw-Type Dry Vacuum Pump 7000 to 30000 to 0.08
TRIC   Screw-Type Dry Vacuum Pump 30000 to 60000 to 0.08

Application
Research & Development
Picture / TDA
Series Catalog Pump Type Pumping Speed(l/min) Ultimate Pressure(Pa)
TDA PDF Screw-Type Dry Vacuum Pump 150 to 700 to 1.0
  • RemarksAir-cooled type

Application
Pharmaceutical Manufacturing Process
Chemical Products Manufacturing Process
Single Crystal Pulling Process
Picture / MDP
Series Catalog Pump Type Pumping Speed(l/min) Ultimate Pressure(Pa)
MDP PDF Screw-Type Dry Vacuum Pump 1100 to 35000 to 0.7
SLT PDF Screw-Type Dry Vacuum Pump 1100 to 3000 to 0.7
MDS PDF Screw-Type Dry Vacuum Pump 1800 to 6000 to 30
  • RemarksMain materials:Stainless Steel
TRDS   Screw-Type Dry Vacuum Pump to 35000 to 0.7
  • RemarksPumps with Mechanical Booster

Application
Vacuum Washing Pump
Vacuum Adsorption Pump
Picture / SDV
Series Catalog Pump Type Pumping Speed(l/min) Ultimate Pressure(Pa)
SDV PDF Screw-Type Dry Vacuum Pump 500 to 11500 to 10
  • RemarksExclusive for Air
SDF PDF Screw-Type Dry Vacuum Pump 500 to 850 to 30
  • RemarksExclusive for Air / Air-cooled type

  • Note1: This list indicates the scope of nominal value for the series of all each series. Please consult our business office for more details about model selection.
  • Note2: There are many more varieties of models we can manufacture besides this list. Please consult our business office for details.
  • Note3: Sizes and specifications of the products in this list are subject to change for improvement without notice.

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