Vacuum Pump

Taiko’s dry vacuum pump, provided with unique shaped screws, is one of the screw-type pumps that operate most slowly in the world.
Screw type vacuum pump compresses, in one stage, the handled gas with non-contacting operation through from suction to discharge. This achieves the feature that powder and mist accompanying the handled gas are discharge efficiently. For this feature, screw type vacuum pump is widely used as a highly-reliable pump in the industries including semiconductor, liquid crystal, solar battery, pharmaceutical, chemical.

What is Vacuum Pump?

Principle of operation

Taiko Kikai’s vacuum pump is provided with a pair of screws in the casing. The screws are assembled together to provide some cavities for capturing the handled gas. The rotation of the screws transfers the captured gas along the shafts.

Queen Bee Screw is adopted in Taiko Kikai’s vacuum pump.

Taiko Kikai’s vacuum pump is dry type vacuum pump, which prevents oil-back-flow to produce a clean vacuum.

Principle of operation image

Screw rotor

Shape of vacuum pump rotor

Queen Bee Screw
of Taiko Kikai’s vacuum pump

Queen Bee Screw of Taiko Kikai’s vacuum pump image

The rotors closely mesh with each other to minimize the gaps between them. This decreases the internal leakage amount.
Foreign matters can be removed with claw-like shaped vanes.

Less rotation and high efficiency

Rectangular-threaded screw

Rectangular-threaded screw image

Low capacity tends to let the foreign matter remain inside pump.

Configurations of vacuum pumps

Queen Bee Screw
(Taiko Kikai's vacuum pump)

Queen Bee Screw (Taiko Kikai's vacuum pump) image

The flow route is short and has no branches. This minimizes gas agitation and residual particle to discharge the foreign matters, including particle, efficiently.

Less lock-with-particle minimize the failure rate.

Multi-staged roots claw type impeller

Multi-staged roots claw type impeller image

Handled gas is compressed in each cavity in stages. This can lead to lock-with-particle and residual particle in each stage.

Features of Queen Bee Screw

  • 1Less locking and clogging with foreign matters
  • 2Less rotation, smaller noise, smaller vibration
  • 3Queen-Bee-end and tapered-end each has a different shaped screw. This narrows the gap between screws to decrease the internal leak amount
  • 4Handled gas is less likely to liquefy
  • 5Handled gas is less likely to sublime
  • 6Handled gas is less likely to get adhesive
  • 7Extremely low performance-degradation after long term use
  • 8High efficiency ecoVP rotor, which does not require cooling purge, saves energy

Types of vacuum pump screw

1ecoVP rotor

Gradual continuous compression requires lower power for operation.

ecoVP rotor image
Lower discharge temperature, and energy-saving operation.

2Equally-pitched screw

Handled gas is compressed at the final stage of the screw, thus the final lead receives a large portion of the work.

Equally-pitched screw image

Surface finishing

Surface finishing

Surface finishing is performed for decreasing the coefficient of friction of the screw and increasing the anti-corrosion ability of the inside of pump.

1Molybdenum disulfide base
heatproof resin coating

The method for coating the surface of the base material.

Molybdenum disulfide base heatproof resin coating image

2Electroless plating

The method for forming a metal film on the base material by impregnating with plating liquid.

Electroless plating image

Types of surface finishing

Category of surface finishing Molybdenum disulfide base heatproof resin coating Electroless plating
Type of surface finishing Standard coating Anti-corrosion organic binder containing coating Electroless nickel plating Multi-layered film electroless nickel plating Fluoro resin fine particle containing electroless nickel plating
Heat resistance
Corrosion resistance △(Repellency◎)
Coefficient of friction Low Low Somewhat high Somewhat high Low
Time of finishing work Short Short Long Long Long
Cost Low Low Somewhat high High High

Types of purge of vacuum pump

Seal purge

Pressurizing the fluid inside the casing prevents the fluid to go into the side case.

  • Side case (A) image

    Side case (A)

  • Drive end image

    Drive end

  • Side case (B) image

    Side case (B)

  • Driven end image

    Driven end

Cooling purge

Cooling purge is introduced from the side of the casing for cooling of the rotor and dilution of corrosive gas.

Cooling purge image

Cleaning purge

Cleaning purge is introduced from the inlet of the pump for cleaning inside the pump.

Cleaning purge image


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