Products

Vacuum Pump

Vacuum Pump image 1

Application

  • Semiconductor Manufacturing Process
  • Flat Panel Display Manufacturing Process
  • Photovoltaics Manufacturing Process
Series Pump Type Pumping Speed (ℓ/min) Ultimate Pressure (Pa) Catalog
TD Screw-Type Dry Vacuum Pump 650 to 3000 to 0.7 PDF
[Remarks] Programable Controller type
BEH Screw-Type Dry Vacuum Pump 7000 to 30000 to 0.08 PDF
TRIC Screw-Type Dry Vacuum Pump 30000 to 60000 to 0.08
Vacuum Pump image 2

Application

  • Pharmaceutical Manufacturing Process
  • Chemical Products Manufacturing Process
  • Single Crystal Pulling Process
Series Pump Type Pumping Speed (ℓ/min) Ultimate Pressure (Pa) Catalog
MDP-V Screw-Type Dry Vacuum Pump 5500 to 22000 to 0.5 PDF
[Remarks] Eco VP rotor designed specially for energy saving more
MDP Screw-Type Dry Vacuum Pump 1100 to 35000 to 0.7 PDF
SLT Screw-Type Dry Vacuum Pump 1100 to 3000 to 0.7 PDF
TRDS Screw-Type Dry Vacuum Pump to 35000 to 0.7
[Remarks] Pumps with Mechanical Booster
Vacuum Pump image 3

Application

  • Vacuum Washing Pump
  • Vacuum Adsorption Pump
Series Pump Type Pumping Speed (ℓ/min) Ultimate Pressure (Pa) Catalog
SDV Screw-Type Dry Vacuum Pump 500 to 11500 to 20 PDF
[Remarks] Exclusive for Air
SDF Screw-Type Dry Vacuum Pump 500 to 850 to 30 PDF
[Remarks] Exclusive for Air/Air-cooled type

* This list indicates the scope of nominal value for the series of all each series. Please consult our business office for more details about model selection.
* There are many more varieties of models we can manufacture besides this list. Please consult our business office for details.
* Sizes and specifications of the products in this list are subject to change for improvement without notice.